CPC H01L 27/1464 (2013.01) [H01L 27/1461 (2013.01); H01L 27/1463 (2013.01); H01L 27/14612 (2013.01); H01L 27/14621 (2013.01); H01L 27/14623 (2013.01); H01L 27/14645 (2013.01); H10K 59/13 (2023.02)] | 20 Claims |
1. An image sensor comprising:
a substrate;
a photodiode in the substrate;
a light shield grid on the photodiode;
a light shielding filter layer formed above the light shield grid, the light shielding filter layer including an opening above the photodiode;
a planarization layer formed above the light shielding filter layer; and
an anti-reflection film, including a plurality of sub-films on and planar to the planarization layer;
wherein the plurality of sub-films comprises a stack including at least a first sub-film and a second sub-film.
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