CPC H01L 27/0886 (2013.01) [H01L 21/3065 (2013.01); H01L 21/32133 (2013.01); H01L 21/76224 (2013.01); H01L 21/76229 (2013.01); H01L 21/823431 (2013.01); H01L 21/823437 (2013.01); H01L 21/823481 (2013.01); H01L 27/0207 (2013.01); H01L 29/0649 (2013.01); H01L 29/66545 (2013.01); H01L 29/7842 (2013.01); H01L 21/3086 (2013.01); H01L 21/31053 (2013.01); H01L 21/3212 (2013.01)] | 20 Claims |
1. A structure comprising:
a first fin and a second fin protruding from a substrate;
a first isolation region over the substrate between the first fin and the second fin;
a first gate structure on the first fin;
a first insulating structure on the first isolation region; and
a second insulating structure adjacent the first insulating structure, wherein the first insulating structure is between the second insulating structure and the first gate structure, wherein the second insulating structure contacts a sidewall of the first isolation region, wherein an upper surface of the second insulating structure is level with an upper surface of the first insulating structure and an upper surface of the first gate structure.
|