CPC H01L 27/0805 (2013.01) [H01L 23/642 (2013.01); H01L 25/0657 (2013.01); H01L 25/105 (2013.01); H01L 28/40 (2013.01); H01L 28/90 (2013.01); H01L 29/66181 (2013.01); H01L 29/945 (2013.01); H10B 12/038 (2023.02); H10B 12/37 (2023.02); H10B 12/39 (2023.02); H01L 2924/19041 (2013.01)] | 8 Claims |
1. A stacked capacitor assembly comprising a plurality of capacitor assemblies stacked vertically and electrically coupled together, wherein at least one of the plurality of capacitor assemblies comprises a first capacitor assembly, the first capacitor assembly comprising:
a first array of trench capacitors; and
a second array of trench capacitors disposed adjacent to and electrically coupled to the first array of trench capacitors, the second array of trench capacitors being inverted with respect to the first array of trench capacitors.
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