US 11,894,255 B2
Sheath and temperature control of process kit
Jaeyong Cho, San Jose, CA (US); Kartik Ramaswamy, San Jose, CA (US); and Daniel Sang Byun, Campbell, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Jul. 27, 2020, as Appl. No. 16/939,160.
Claims priority of provisional application 62/880,529, filed on Jul. 30, 2019.
Prior Publication US 2021/0035844 A1, Feb. 4, 2021
Int. Cl. H01L 21/683 (2006.01); H01L 21/687 (2006.01); H01L 21/67 (2006.01); H01J 37/32 (2006.01)
CPC H01L 21/6833 (2013.01) [H01J 37/32642 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/68721 (2013.01)] 20 Claims
OG exemplary drawing
 
10. A process chamber, comprising:
a chamber body having a substrate support disposed within an inner volume of the chamber body, wherein the substrate support includes:
a ceramic plate having a first side configured to support a substrate and a second side opposite the first side, wherein the ceramic plate includes an electrode embedded in the ceramic plate;
a first cooling plate coupled to the second side of the ceramic plate;
a ceramic ring disposed about the ceramic plate and having a first side and a second side opposite the first side, wherein the ceramic ring includes one or more chucking electrodes and a heating element disposed in the ceramic ring,
wherein the ceramic ring is spaced apart from the ceramic plate and the first cooling plate;
an edge ring disposed on the ceramic ring;
a second cooling plate coupled to the second side of the ceramic ring, wherein the second cooling plate is a ring disposed about the first cooling plate with a gap disposed between the first cooling plate and the second cooling plate;
wherein the second cooling plate is thermally isolated from the first cooling plate;
wherein the first cooling plate and the second cooling plate include coolant channels configured to circulate a coolant, wherein the coolant channels of the first cooling plate are fluidly independent from the coolant channels of the second cooling plate;
a first gas channel extending from the first side to the second side of the ceramic plate;
a second gas channel extending from the first side to the second side of the ceramic ring; and
one or more sealing elements disposed between:
the ceramic ring and the second cooling plate;
the first cooling plate and the second cooling plate; and
the ceramic ring and the edge ring, dimensioned and arranged to prevent a gas flow from the second gas channel into the gap disposed between the first cooling plate and the second cooling plate; and
a power source coupled to the heating element to control a temperature of the ceramic ring independent of the temperature of the ceramic plate.