CPC H01L 21/02019 (2013.01) [B28D 5/042 (2013.01); C30B 25/186 (2013.01); C30B 29/40 (2013.01); C30B 33/10 (2013.01); H01L 29/20 (2013.01)] | 13 Claims |
1. An indium phosphide substrate comprising a main surface for forming an epitaxial crystal layer and a back surface opposite to the main surface,
wherein the back surface has a BOW value of −2.0 to 2.0 μm, as measured with the back surface of the indium phosphide substrate facing upward.
|