CPC H01J 37/304 (2013.01) [G01N 23/2251 (2013.01); G06N 20/00 (2019.01); H01J 37/222 (2013.01); H01L 22/12 (2013.01); H01J 2237/221 (2013.01); H01J 2237/24475 (2013.01)] | 20 Claims |
1. A method, comprising:
emitting an electron beam towards a specimen;
modulating the electron beam to obtain a beam signal, wherein the modulating is based on a wave that controls the beam signal, and wherein the modulating includes adjusting a beam current that reaches the specimen;
detecting, using an electron detector, secondary and/or backscattered electrons emitted by the specimen to obtain electron data, wherein the electron data defines a detection signal;
determining, using a processor, a comparison between the wave controlling the beam signal and a wave for the detection signal; and
filtering, using the processor, the detection signal based on the comparison.
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