US 11,892,821 B2
Communication node to interface between evaluation systems and a manufacturing system
Michael Howells, San Jose, CA (US); Thorsten Kril, Santa Cruz, CA (US); Hemanth Konanur Nagendra, Santa Clara, CA (US); and Jatinder Sasan, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by APPLIED MATERIALS, INC., Santa Clara, CA (US)
Filed on Mar. 15, 2022, as Appl. No. 17/695,058.
Prior Publication US 2023/0297072 A1, Sep. 21, 2023
Int. Cl. G05B 19/18 (2006.01); G05B 19/4155 (2006.01)
CPC G05B 19/4155 (2013.01) [G05B 19/182 (2013.01); G05B 2219/24015 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An electronic device manufacturing system, comprising:
a process tool; and
a tool server coupled to the process tool and comprising a communication node and an evaluation system, wherein the communication node is configured to:
obtain one or more attributes from the evaluation system;
provide a monitoring device comprising a data collection plan that is based on the one or more attributes;
register the monitoring device with the process tool;
receive, from the process tool, data based on the data collection plan; and
send the received data to the evaluation system.