CPC G05B 19/4155 (2013.01) [G05B 19/182 (2013.01); G05B 2219/24015 (2013.01)] | 19 Claims |
1. An electronic device manufacturing system, comprising:
a process tool; and
a tool server coupled to the process tool and comprising a communication node and an evaluation system, wherein the communication node is configured to:
obtain one or more attributes from the evaluation system;
provide a monitoring device comprising a data collection plan that is based on the one or more attributes;
register the monitoring device with the process tool;
receive, from the process tool, data based on the data collection plan; and
send the received data to the evaluation system.
|