US 11,892,767 B2
Stud attachment device and stud attachment method with independent temperature/pressure control
Byungchul Yoo, Yongin-si (KR); Sunghoon Park, Hwaseong-si (KR); and Mun Ja Kim, Hwaseong-si (KR)
Assigned to Samsung Electronics Co., Ltd., Gyeonggi-do (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Mar. 24, 2021, as Appl. No. 17/211,165.
Claims priority of application No. 10-2020-0126477 (KR), filed on Sep. 29, 2020.
Prior Publication US 2022/0100076 A1, Mar. 31, 2022
Int. Cl. G03F 1/22 (2012.01); G03F 7/00 (2006.01)
CPC G03F 1/22 (2013.01) [G03F 7/70983 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A stud attachment device configured to attach a plurality of studs to a photomask, the stud attachment device comprising:
a body;
a plurality of holders extending from the body, the plurality of holders configured to receive the plurality of studs laid on respective ones thereof; and
a pressure regulator configured to independently control pressures of the plurality of holders by adjusting heights of the plurality of holders while the stud attachment device attaches the plurality of studs to the photomask.