CPC G03F 1/22 (2013.01) [G03F 7/70983 (2013.01)] | 19 Claims |
1. A stud attachment device configured to attach a plurality of studs to a photomask, the stud attachment device comprising:
a body;
a plurality of holders extending from the body, the plurality of holders configured to receive the plurality of studs laid on respective ones thereof; and
a pressure regulator configured to independently control pressures of the plurality of holders by adjusting heights of the plurality of holders while the stud attachment device attaches the plurality of studs to the photomask.
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