CPC G02B 5/26 (2013.01) [G02B 5/0816 (2013.01); H01L 27/14629 (2013.01); H01L 27/14685 (2013.01)] | 20 Claims |
1. A filter comprising:
a stepped medium comprising:
a first pillar forming a first channel, and
a second pillar forming a second channel,
the second channel being inactive;
a mirror disposed on the stepped medium; and
a monolithic spacer disposed on at least a portion of a stepped surface of the mirror.
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