US 11,892,499 B2
Testing machine and testing method
Kang Lv, Hefei (CN); Yang Xiong, Hefei (CN); and Jian Hu, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Sep. 21, 2021, as Appl. No. 17/480,369.
Application 17/480,369 is a continuation of application No. PCT/CN2021/103797, filed on Jun. 30, 2021.
Claims priority of application No. 202011519537.0 (CN), filed on Dec. 21, 2020.
Prior Publication US 2022/0196726 A1, Jun. 23, 2022
Int. Cl. G01R 31/28 (2006.01); G01R 31/26 (2020.01)
CPC G01R 31/2863 (2013.01) [G01R 31/2642 (2013.01); G01R 31/2879 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A testing equipment, comprising:
a plurality of pad groups and a plurality of source measure units, each of the pad groups having a stress pad, the stress pad being configured to connect an element under test, a corresponding source measure unit of the source measure units being configured to send an input signal to the element under test through the stress pad and measure an output signal of the element under test to acquire performance parameters of the element under test, wherein the stress pads of at least two of the pad groups are connected to the corresponding source measure units a same time;
wherein the stress pad of at least one of the pad groups is electrically connected to an accessory pad at another position through a metal lead, so as to be connected to the corresponding source measure unit through the accessory pad.