US 11,892,471 B2
Method and device for simultaneous independent motion measurement of multiple probes in atomic force microscope
Lianqing Liu, Liaoning (CN); Jialin Shi, Liaoning (CN); and Peng Yu, Liaoning (CN)
Assigned to SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES, Liaoning (CN)
Appl. No. 17/757,328
Filed by SHENYANG INSTITUTE OF AUTOMATION, CHINESE ACADEMY OF SCIENCES, Liaoning (CN)
PCT Filed May 8, 2021, PCT No. PCT/CN2021/092278
§ 371(c)(1), (2) Date Jun. 14, 2022,
PCT Pub. No. WO2022/057276, PCT Pub. Date Mar. 24, 2022.
Claims priority of application No. 202010973495.1 (CN), filed on Sep. 16, 2020.
Prior Publication US 2023/0020068 A1, Jan. 19, 2023
Int. Cl. G01Q 20/02 (2010.01); G01Q 60/38 (2010.01)
CPC G01Q 20/02 (2013.01) [G01Q 60/38 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A device for simultaneous independent motion measurement of multiple probes in an atomic force microscope, comprising:
at least two cantilever arms that are parallelly arranged, each cantilever arm having a needle tip affixed thereto, a surface of each cantilever arm comprising a grating structure having periodically distributed rulings for reflecting laser irradiated on the grating structure;
a plurality of light detectors, each configured to receive light reflected by one of the at least two cantilever arms; and
a plurality of light filters, each filter disposed in a path of the reflected light to filter interference from reflected light from the at least two cantilever arms so that only light reflected from one of the at least two cantilever arms reaches one of the plurality of light detectors,
wherein each light filter has a central wavelength and the center wavelengths are different from one another.