US 11,892,249 B2
Heat dissipation table made of alloy material and with special waterway design
Changqing Hu, Shanghai (CN); and Jianhai Zhao, Shanghai (CN)
Assigned to Shanghai Worldiray Semiconductor Technology Co., Ltd., Shanghai (CN)
Filed by Shanghai Worldiray Semiconductor Technology Co., Ltd., Shanghai (CN)
Filed on Jun. 17, 2022, as Appl. No. 17/843,847.
Claims priority of application No. 202110794764.2 (CN), filed on Jul. 14, 2021.
Prior Publication US 2023/0020144 A1, Jan. 19, 2023
Int. Cl. F28F 21/08 (2006.01); C22C 9/02 (2006.01)
CPC F28F 21/085 (2013.01) [C22C 9/02 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A heat dissipation apparatus comprising:
a sample placing table having a top surface for supporting a substrate during processing of the substrate and a bottom surface;
a heating structure formed separately from the sample placing table and comprising a first graphene piece having a top surface contacting the bottom surface of the sample placing table and a bottom surface, a second graphene piece having a top surface opposing the bottom surface of the first graphene piece and a bottom surface, and a heating wire disposed between the first and second graphene pieces, the heating structure having a through hole extending through both graphene pieces from the top surface of the first graphene piece to the bottom surface of the second graphene piece;
a heat dissipation table formed separately from the heating structure and having a top surface contacting the bottom surface of the second graphene piece and a bottom surface, the heat dissipation table having a through hole extending from the top surface to the bottom surface of the heat dissipation table and forming a channel together with the through hole in the heating structure, and a plurality of annular waterway grooves formed inside the heat dissipation table and fluidly communicating with the through hole in the heat dissipation table;
a heat dissipation pipeline having an upper end embedded in the through hole in the heat dissipation table and a lower end extending out of the heat dissipation table; and
a protective cover surrounding the heat dissipation table.