US 11,891,715 B2
Paddle, processing apparatus having the paddle, and method of producing the paddle
Yasuyuki Masuda, Tokyo (JP); Shao Hua Chang, Tokyo (JP); Yoshitaka Mukaiyama, Tokyo (JP); Masashi Shimoyama, Tokyo (JP); and Jumpei Fujikata, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by EBARA CORPORATION, Tokyo (JP)
Filed on Feb. 17, 2021, as Appl. No. 17/177,500.
Claims priority of application No. 2020-027004 (JP), filed on Feb. 20, 2020.
Prior Publication US 2021/0262111 A1, Aug. 26, 2021
Int. Cl. C25D 17/02 (2006.01); C25D 21/10 (2006.01); B33Y 80/00 (2015.01); B33Y 50/02 (2015.01); B33Y 10/00 (2015.01)
CPC C25D 21/10 (2013.01) [B33Y 10/00 (2014.12); B33Y 50/02 (2014.12); B33Y 80/00 (2014.12); C25D 17/02 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A paddle for agitating an electroplating liquid in an electroplating tank, comprising:
a frame comprising a top portion configured to be reciprocated in the electroplating liquid by a reciprocating mechanism;
a plurality of agitating beams coupled to the frame, the plurality of agitating beams forming a honeycomb structure, the honeycomb structure having a plurality of hexagonal through-holes formed by the plurality of agitating beams, an arrangement direction of the plurality of hexagonal through-holes being inclined with respect to a longitudinal direction of the frame, wherein the agitating beams of the paddle cause the agitation of the electroplating liquid when moved in the electroplating tank by the reciprocating mechanism.