US 11,891,701 B2
Spraying material, spraying slurry, preparing method of spraying material, forming method of sprayed coating, sprayed coating, and sprayed member
Ryo Iwasaki, Echizen (JP); Noriaki Hamaya, Echizen (JP); Toshihiko Tsukatani, Echizen (JP); and Yugo Taniguchi, Echizen (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Filed by Shin-Etsu Chemical Co., Ltd., Tokyo (JP)
Filed on Apr. 8, 2020, as Appl. No. 16/842,945.
Claims priority of application No. 2019-076099 (JP), filed on Apr. 12, 2019.
Prior Publication US 2020/0325570 A1, Oct. 15, 2020
Int. Cl. C23C 4/11 (2016.01); C23C 4/18 (2006.01); C23C 4/134 (2016.01); C04B 35/505 (2006.01); C04B 35/10 (2006.01); C04B 35/01 (2006.01)
CPC C23C 4/11 (2016.01) [C04B 35/01 (2013.01); C04B 35/10 (2013.01); C04B 35/505 (2013.01); C23C 4/134 (2016.01); C23C 4/18 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A spraying material comprising a rare earth (R), aluminum (Al), and oxygen (O), the spraying material being a powder made of particles which comprise a mixed phase comprising a crystalline phase of a rare earth aluminum monoclinic (R4Al2O9) and a crystalline phase of a rare earth oxide (R2O3);
wherein, with respect to diffraction peaks detected within a diffraction angle 2θ range from 10° to 70° by a X-ray diffraction method using the characteristic X-ray of Cu-Kα, the spraying material has diffraction peaks attributed to the rare earth oxide (R2O3) and diffraction peaks attributed to the rare earth aluminum monoclinic (R4Al2O9),
and an intensity ratio I(R)/I(RAL) of an integral intensity I(R) of the maximum diffraction peak attributed to the rare earth oxide (R2O3) to an integral intensity I(RAL) of the maximum diffraction peak attributed to the rare earth aluminum monoclinic (R4Al2O9) is at least 2;
wherein the spraying material has a bulk density ρ of up to 2 g/cm3 and a BET specific surface area S of from 1 m2/g to 3.5 m2/g,
and a value of S/ρ, which is obtained by dividing a numerical value of the BET specific surface area S by a numerical value of the bulk density ρ, is of 1

OG Complex Work Unit Math
to 4

OG Complex Work Unit Math
; and
wherein the spraying material has a rare earth (R) content and an aluminum content (Al) such that, when converted to a rare earth oxide (R2O3) content and an aluminum oxide (Al2O3) content, the rare earth oxide (R2O3) content is from 75 to 99 wt. % and the aluminum oxide (Al2O3) content is from 1 to 25 wt. % with respect to a total content of the rare earth oxide (R2O3) content and the aluminum oxide (Al2O3) content.