US 11,891,695 B2
Vibrating deposition device
Jing-Cheng Lin, Hsinchu County (TW)
Assigned to SKY TECH INC., Hsinchu County (TW)
Filed by SKY TECH INC., Hsinchu County (TW)
Filed on Mar. 16, 2022, as Appl. No. 17/696,496.
Prior Publication US 2023/0295802 A1, Sep. 21, 2023
Int. Cl. C23C 16/455 (2006.01); C23C 16/44 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/4417 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A vibrating deposition device, comprising:
a vacuum chamber comprising an inner side surface, a first base and a second base, wherein the first base and the second base are respectively disposed two sides of the inner side surface forming a reaction space, wherein the inner side surface is provided with a plurality of bulges and a plurality of notches;
a fixed rod located in the reaction space of the vacuum chamber, wherein the vacuum chamber is rotatable relative to the fixed rod;
a powder tank located in the reaction space of the vacuum chamber, and comprising:
a box body for accommodating powders, and connected to the fixed rod through a connecting bracket; and
at least one protruding unit located on an outer surface of the box body, and contacting the inner side surface of the vacuum chamber, wherein when the vacuum chamber rotates relative to the fixed rod and the powder tank, the bulges and the notches on the inner side surface will move relative to the protruding unit of the box body, so that the powder tank is displaced up and down relative to the vacuum chamber to vibrate the powders in the box body.