CPC C23C 16/18 (2013.01) [C23C 16/45527 (2013.01); C23C 16/45553 (2013.01); H01L 21/0234 (2013.01); H01L 21/02175 (2013.01); H01L 21/02205 (2013.01); H01L 21/28568 (2013.01)] | 19 Claims |
1. A method of forming a molybdenum film, the method comprising:
exposing a substrate surface to an organometallic molybdenum precursor and an oxidant to form a molybdenum oxide film, the organometallic molybdenum precursor comprising one or more of CpMo(CO)2(NO) or MeCpMo(CO)2(NO); and
reducing the molybdenum oxide film to form a molybdenum film.
|