US 11,891,688 B2
Mask and deposition apparatus including the same
Youngmin Moon, Yongin-si (KR); Jeongkuk Kim, Suwon-si (KR); Minho Moon, Seongnam-si (KR); Ji-Hee Son, Hwaseong-si (KR); Seungyong Song, Suwon-si (KR); and Areum Lee, Suwon-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., Ltd., Yongin-si (KR)
Filed on May 19, 2022, as Appl. No. 17/748,596.
Claims priority of application No. 10-2021-0097622 (KR), filed on Jul. 26, 2021.
Prior Publication US 2023/0022195 A1, Jan. 26, 2023
Int. Cl. C23C 16/04 (2006.01)
CPC C23C 16/042 (2013.01) [C23C 16/045 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A mask comprising:
a protruding portion provided with a deposition hole formed therethrough, the protruding portion comprising:
an upper surface,
a lower surface facing the upper surface,
a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, and
at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface protruding portion; and
a peripheral portion, the peripheral portion comprising:
a first surface extending from the upper surface of the protruding portion, and
a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion; and
a coating layer disposed on the protruding portion, the coating layer covering at least one of the protrusion and the groove.