CPC C23C 16/042 (2013.01) [C23C 16/045 (2013.01)] | 20 Claims |
1. A mask comprising:
a protruding portion provided with a deposition hole formed therethrough, the protruding portion comprising:
an upper surface,
a lower surface facing the upper surface,
a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, and
at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface protruding portion; and
a peripheral portion, the peripheral portion comprising:
a first surface extending from the upper surface of the protruding portion, and
a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion; and
a coating layer disposed on the protruding portion, the coating layer covering at least one of the protrusion and the groove.
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