US 11,891,685 B2
Vacuum processing apparatus
Yukihito Tashiro, Kanagawa (JP); and Shigeru Sugiyama, Kanagawa (JP)
Assigned to ULVAC, INC., Kanagawa (JP)
Appl. No. 17/433,140
Filed by ULVAC, INC., Kanagawa (JP)
PCT Filed Mar. 11, 2020, PCT No. PCT/JP2020/010586
§ 371(c)(1), (2) Date Aug. 23, 2021,
PCT Pub. No. WO2021/014675, PCT Pub. Date Jan. 28, 2021.
Claims priority of application No. 2019-134821 (JP), filed on Jul. 22, 2019.
Prior Publication US 2022/0154324 A1, May 19, 2022
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01); H01J 37/32 (2006.01); H01L 21/67 (2006.01)
CPC C23C 14/34 (2013.01) [H01J 37/32513 (2013.01); H01J 37/32733 (2013.01); H01J 37/3435 (2013.01); H01L 21/67167 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A vacuum processing apparatus for performing predetermined vacuum processing on a processing surface of a to-be-processed substrate, the vacuum processing apparatus comprising:
a vacuum chamber having disposed therein the to-be-processed substrate and, provided that a direction in which the to-be-processed surface looks is defined as an upper side, having formed on an upper wall of the vacuum chamber a mounting opening facing the processing surface where a direction in which the processing surface looks is defined as an upper side;
a processing unit disposed above the vacuum chamber, the process unit for performing therein vacuum processing;
a communication pipe having a predetermined length and being interposed and connected between an upper wall of the vacuum chamber and a lower surface of a supporting body for the processing unit such that predetermined processing is performed, through the communication pipe, on the to-be-processed substrate inside the vacuum chamber in vacuum atmosphere,
wherein the processing unit further comprises an engaging means to which is coupled a swing arm to swing about a rotary shaft extending perpendicularly to a vertical direction for selectively engaging the vacuum chamber and the communication pipe or the processing unit and the communication pipe.