CPC H10N 30/20 (2023.02) [H10N 30/03 (2023.02); H10N 30/06 (2023.02); H10N 30/204 (2023.02); H10N 30/871 (2023.02); H10N 30/878 (2023.02)] | 20 Claims |
1. A method of fabricating an actuator assembly, the method comprising:
defining a first electrode on a first side of a piezoelectric element, wherein the defining the first electrode includes:
(i) defining a first metallic film on the first side of the piezoelectric element; and
(ii) operatively attaching a flexible, electrically conductive membrane to the first side of the piezoelectric element such that the flexible, electrically conductive membrane is in electrical communication with the first side of the piezoelectric element; wherein the operatively attaching the flexible, electrically conductive membrane includes operatively attaching such that the first metallic film extends between, and electrically separates, the first side of the piezoelectric element and the flexible, electrically conductive membrane; and
defining a second electrode on a second side of the piezoelectric element.
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