US 11,870,424 B2
Filters using transversly-excited film bulk acoustic resonators with frequency-setting dielectric layers
Viktor Plesski, Gorgier (CH); Soumya Yandrapalli, Lausanne (CH); Robert B. Hammond, Santa Barbara, CA (US); Bryant Garcia, Belmont, CA (US); Patrick Turner, San Bruno, CA (US); Jesson John, Dublin, CA (US); and Ventsislav Yantchev, Sofia (BG)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on May 11, 2021, as Appl. No. 17/317,754.
Application 17/317,754 is a continuation of application No. 17/109,812, filed on Dec. 2, 2020.
Application 17/109,812 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Prior Publication US 2021/0265978 A1, Aug. 26, 2021
Int. Cl. H03H 9/56 (2006.01); H03H 9/02 (2006.01); H03H 9/13 (2006.01); H03H 9/17 (2006.01); H03H 3/02 (2006.01); H10N 30/87 (2023.01)
CPC H03H 9/568 (2013.01) [H03H 3/02 (2013.01); H03H 9/02015 (2013.01); H03H 9/02031 (2013.01); H03H 9/02062 (2013.01); H03H 9/02228 (2013.01); H03H 9/132 (2013.01); H03H 9/174 (2013.01); H03H 9/176 (2013.01); H03H 9/562 (2013.01); H03H 9/564 (2013.01); H03H 9/02039 (2013.01); H03H 2003/023 (2013.01); H10N 30/877 (2023.02)] 22 Claims
OG exemplary drawing
 
1. A filter device, comprising:
a piezoelectric plate comprising a supported portion, a first diaphragm, and a second diaphragm, wherein a back surface of the supported portion is attached to a substrate and each of the first and second diaphragms spans a respective cavity in the substrate;
a first interdigital transducer (IDT) on a front surface of the piezoelectric plate, interleaved fingers of the first IDT on the first diaphragm;
a second interdigital transducer (IDT) on the front surface of the piezoelectric plate, interleaved fingers of the second IDT on the second diaphragm;
a first dielectric layer on the front surface of the piezoelectric plate between the interleaved fingers of the first IDT; and
a second dielectric layer on the front surface of the piezoelectric plate between the interleaved fingers of the second IDT,
wherein a thickness of the first dielectric layer is greater than a thickness of the second dielectric layer, and
the piezoelectric plate and the first and second IDTs are configured such that radio frequency signals applied to the first and second IDTs excite primary shear acoustic modes in the respective diaphragms.