CPC H01P 1/18 (2013.01) [H01Q 3/34 (2013.01)] | 17 Claims |
1. A phase shifter, comprising:
a substrate;
a signal electrode, and a first reference electrode and a second reference electrode respectively on two sides of an extending direction of the signal electrode; the signal electrode, the first reference electrode and the second reference electrode being all on the substrate;
an interlayer insulating layer on a side, away from the substrate, of the signal electrode, the first reference electrode and the second reference electrode;
at least one phase control unit, each of which comprises a film bridge on a side of the interlayer insulating layer away from the substrate; the signal electrode being in a space enclosed by the film bridge and the substrate, and two ends of the film bridge being respectively overlapped with orthographic projections of the first reference electrode and the second reference electrode on the substrate; and
wherein at least part of the at least one phase control unit further comprises at least one driving structure between the substrate and the interlayer insulating layer, the driving structure comprises at least a driving electrode; at least part of the at least one driving structure has a different height from a height of the signal electrode in a direction away from the substrate; the driving structure in each phase control unit is at least partially overlapped an orthographic projection of the film bridge on the substrate.
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