US 11,870,013 B2
Hermetically sealed optoelectronic module having increased output of electromagnetic radiation
Frank Gindele, Schweitenkirchen (DE); Christian Rakobrandt, Schwindegg (DE); Alexander Neumeier, Moosburg/Aich (DE); and Robert Hettler, Kumhausen (DE)
Assigned to SCHOTT AG, Mainz (DE)
Filed by SCHOTT AG, Mainz (DE)
Filed on Jun. 7, 2021, as Appl. No. 17/341,228.
Claims priority of application No. 10 2020 114 952.2 (DE), filed on Jun. 5, 2020.
Prior Publication US 2021/0384384 A1, Dec. 9, 2021
Int. Cl. H01L 33/48 (2010.01); H01L 33/62 (2010.01); H01L 21/56 (2006.01); H01L 23/538 (2006.01)
CPC H01L 33/483 (2013.01) [H01L 21/56 (2013.01); H01L 23/5389 (2013.01); H01L 33/62 (2013.01); H01L 2924/15 (2013.01); H01L 2933/0033 (2013.01)] 23 Claims
OG exemplary drawing
 
1. An optoelectronic module, comprising:
a carrier element;
an optoelectronic element on the carrier element;
a cover having a frame and a glass element, the frame being connected to the carrier element so as to fully surround the optoelectronic element in a circumferential direction, the glass element being on the frame and lying substantially opposite the carrier element, the glass element being configured to input and/or output electromagnetic radiation into the optoelectronic element through the cover;
a cavity defined by an inner surface of the cover and an upper surface of the carrier element, the optoelectronic element being hermetically and/or autoclavably secured in the cavity;
a filler material in the cavity; and
a deformable compensation volume configured to compensate for an expansion of a volume occupied by the filler material,
wherein the optoelectronic element has a beam path between the optoelectronic element and the glass element that is free from the deformable compensation volume.