CPC H01L 33/00 (2013.01) [B82Y 20/00 (2013.01); H01L 25/0753 (2013.01); H01L 33/0062 (2013.01); H01L 33/30 (2013.01); H01L 2933/0033 (2013.01)] | 17 Claims |
1. A metal oxide nanoparticle, comprising:
a Zn containing metal Me1 oxide nanoparticle of Zn1-xMe1O (0≤x≤0.5) composition; and
a metal Me2 ion surface treatment layer formed on a surface of the Zn containing metal Me1 oxide nanoparticle,
wherein Me1 is any one selected from Li, Be, Na, Mg, Al, K, Ca, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Ga, Ge, Rb, Sr, Zr, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Sb, Ba, or a combination thereof,
wherein Me2 is any one selected from Li, Be, Na, Mg, Al, K, Ca, Ti, V, Cr, Mn, Fe, Co, Ni, Cu, Zn, Ga, Ge, Rb, Sr, Zr, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Sb, Ba, or a combination thereof,
wherein the metal Me2 ion surface treatment layer comprises a layer formed by reaction of a metal Me2 ion with a dangling bond on the surface of the Zn containing metal Me1 oxide nanoparticle, and
wherein the metal oxide nanoparticle comprising the Zn containing metal Me1 oxide nanoparticle and the metal Me2 ion surface treatment layer has an electron mobility lower than that of a metal oxide nanoparticle that contains the Zn containing metal Me1 oxide nanoparticle without the metal Me2 ion surface treatment layer.
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