CPC H01L 33/0093 (2020.05) [B23K 26/0648 (2013.01); B23K 26/127 (2013.01); B23K 26/53 (2015.10); G02B 27/0955 (2013.01); H01L 33/007 (2013.01); H01L 33/20 (2013.01); H01S 5/0213 (2013.01); H01S 5/0217 (2013.01); B23K 26/0622 (2015.10); H01S 2304/02 (2013.01)] | 8 Claims |
1. A patterned epitaxial structure laser lift-off device, comprising a substrate (1), reshaping structures (2), a transmittance adjustment structure (3), a patterned epitaxial structure (4), gas transmission systems (5), an ultraviolet source (6), a lift-off chamber (7) and a light entry window (8), wherein the gas transmission systems are respectively provided at two sides of the lift-off chamber; the light entry window is arranged on the lift-off chamber; the ultraviolet source is above an outside of the light entry window; the patterned epitaxial structure is provided inside the lift-off chamber; the substrate is arranged on the patterned epitaxial structure; the patterned epitaxial structure comprises an epitaxial structure (40), a sapphire substrate (41), patterned structures (42), oblique interfaces (43) and planar interfaces (44), a plurality of patterned structures are uniformly provided on the epitaxial structure, each of the plurality of the patterned structures is a V-shaped groove structure formed by two oblique interfaces, and two adjacent patterned structures are connected by a planar interface, the sapphire substrate, is arranged on the epitaxial structure and the sapphire substrate is located above the patterned structures, the oblique interfaces and the planar interfaces; the substrate is located on the sapphire substrate, a plurality of reshaping structures are provided on the substrate; the reshaping structures are one-to-one correspondence to the patterned structures, the transmittance adjustment structure is provided between two adjacent reshaping structures and the transmittance adjustment structure is located on the substrate; the light entry window is located above the reshaping structures and the transmittance adjustment structure.
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