CPC H01L 27/1207 (2013.01) [H01L 21/02532 (2013.01); H01L 21/28568 (2013.01); H01L 21/845 (2013.01); H01L 27/1211 (2013.01); H01L 29/0847 (2013.01); H01L 29/16 (2013.01); H01L 29/41791 (2013.01); H01L 29/45 (2013.01); H01L 29/66795 (2013.01); H01L 29/785 (2013.01); H10B 61/22 (2023.02); H10B 63/30 (2023.02)] | 20 Claims |
1. An integrated circuit (IC), comprising:
a first device structure comprising:
a first body of semiconductor material comprising at least one of silicon or germanium; and
a plurality of terminals coupled with the first body; and
an insulator layer between the first device structure and an underlying second device structure, wherein the insulator layer comprises silicon and oxygen, and wherein the second device structure comprises:
a second body of semiconductor material comprising at least one of silicon or germanium;
a gate electrode coupled to the second body;
a spacer adjacent to a sidewall of the gate electrode;
a source or drain material coupled with the second body and between at least a portion of the spacer and the insulator layer, wherein the source or drain material comprises at least one of silicon or germanium and one or more donor or acceptor impurities, and;
a metallization structure in contact with the source or drain material, wherein the metallization structure extends through a thickness of the insulator layer and is coupled with one of the terminals of the first device structure.
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