CPC H01L 24/29 (2013.01) [H01L 23/15 (2013.01); H01L 23/3677 (2013.01); H01L 23/3735 (2013.01); H01L 23/4951 (2013.01); H01L 23/49541 (2013.01); H01L 24/27 (2013.01); H01L 24/32 (2013.01); H01L 24/48 (2013.01); H01L 24/73 (2013.01); H01L 2224/2746 (2013.01); H01L 2224/29082 (2013.01); H01L 2224/29344 (2013.01); H01L 2224/29366 (2013.01); H01L 2224/29499 (2013.01); H01L 2224/32225 (2013.01); H01L 2224/32245 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48106 (2013.01); H01L 2224/48247 (2013.01); H01L 2224/73265 (2013.01); H01L 2924/2064 (2013.01)] | 28 Claims |
1. A method, comprising:
forming a set of nanoparticles; and
forming a set of nanowires extending from the set of nanoparticles.
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