CPC H01J 43/10 (2013.01) [H01J 43/02 (2013.01); H01J 43/28 (2013.01); G01T 1/28 (2013.01); H01J 49/025 (2013.01); H01J 49/26 (2013.01)] | 15 Claims |
1. A self-contained particle detector comprising:
an enclosure formed in part by a transmission mode secondary electron emissive element, the enclosure defining an internal environment and an external environment and the enclosure prevents or inhibits movement of a contaminant from the external environment to the internal environment, wherein the transmission mode secondary electron emissive element has an externally facing surface and an internally facing surface and is configured such that impact of a particle on the externally facing surface causes emission of one or more secondary electrons from the internally facing surface.
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