CPC H01J 37/28 (2013.01) [H01J 37/222 (2013.01); H01J 37/224 (2013.01); H01J 37/226 (2013.01); H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2817 (2013.01)] | 7 Claims |
1. A charged particle beam device configured to irradiate a sample with a charged particle beam, the charged particle beam device comprising:
a charged particle source configured to irradiate the sample with primary charged particles;
a light source configured to emit light to be emitted to the sample;
a detector configured to detect secondary charged particles generated from the sample by irradiating the sample with the primary charged particles;
an image processing unit configured to generate an observation image of the sample by using the secondary charged particles detected by the detector; and
a light control unit configured to control one or more optical parameters each representing a physical property of the light, wherein
the one or more optical parameters comprises a polarization plane of the light, and
the light control unit causes the image processing unit to generate the observation image having a contrast corresponding to a changed polarization plane obtained by changing the polarization plane of the light.
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