US 11,869,745 B2
Charged particle beam device
Minami Shouji, Tokyo (JP); Natsuki Tsuno, Tokyo (JP); Hiroya Ohta, Tokyo (JP); and Daisuke Bizen, Tokyo (JP)
Assigned to HITACHI HIGH-TECH CORPORATION, Tokyo (JP)
Appl. No. 17/435,479
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Mar. 27, 2019, PCT No. PCT/JP2019/013177
§ 371(c)(1), (2) Date Sep. 1, 2021,
PCT Pub. No. WO2020/194575, PCT Pub. Date Oct. 1, 2020.
Prior Publication US 2022/0139667 A1, May 5, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/222 (2013.01); H01J 37/224 (2013.01); H01J 37/226 (2013.01); H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 2237/2448 (2013.01); H01J 2237/2817 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A charged particle beam device configured to irradiate a sample with a charged particle beam, the charged particle beam device comprising:
a charged particle source configured to irradiate the sample with primary charged particles;
a light source configured to emit light to be emitted to the sample;
a detector configured to detect secondary charged particles generated from the sample by irradiating the sample with the primary charged particles;
an image processing unit configured to generate an observation image of the sample by using the secondary charged particles detected by the detector; and
a light control unit configured to control one or more optical parameters each representing a physical property of the light, wherein
the one or more optical parameters comprises a polarization plane of the light, and
the light control unit causes the image processing unit to generate the observation image having a contrast corresponding to a changed polarization plane obtained by changing the polarization plane of the light.