CPC H01J 37/20 (2013.01) [G01F 1/34 (2013.01); G05D 7/0635 (2013.01); H01J 2237/006 (2013.01); H01J 2237/26 (2013.01)] | 12 Claims |
1. A system for controlling fluid flow through an electron microscope sample holder, the system comprising:
a pressure control system that supplies source gas, the pressure control system comprising an upstream tank and a downstream low pressure source;
an inlet line for providing the source gas from the pressure control system to the sample holder;
an outlet line for receiving the source gas from the sample holder; and
at least one variable leak valve connected to the outlet line and positioned downstream from the sample holder, wherein the at least one variable leak valve meters the gas flow to achieve a target gas flow rate through the sample holder based on a rate of change of pressure.
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