US 11,869,742 B2
X-ray source with rotating liquid-metal target
Aleksandr Yurievich Vinokhodov, Troitsk Moscow (RU); Vladimir Vitalievich Ivanov, Moscow (RU); Konstantin Nikolaevich Koshelev, Troitsk Moscow (RU); Mikhail Sergeyevich Krivokorytov, Moscow (RU); Vladimir Mikhailovich Krivtsun, Troitsk Moscow (RU); Aleksandr Andreevich Lash, Moscow (RU); Vyacheslav Valerievich Medvedev, Troitsk Moscow (RU); Yury Viktorovich Sidelnikov, Troitsk Moscow (RU); Oleg Feliksovich Yakushev, Moscow Region Korolyev (RU); Denis Alexandrovich Glushkov, Nieuwegein (NL); Samir Ellwi, Crawley (GB); and Oleg Borisovich Khristoforov, Moscow (RU)
Assigned to ISTEQ B.V., Eindhoven (NL); and ISTEQ GROUP HOLDING B.V., Eindhoven (NL)
Appl. No. 17/604,922
Filed by EUV LABS, LTD, Moscow (RU)
PCT Filed Apr. 26, 2020, PCT No. PCT/RU2020/050083
§ 371(c)(1), (2) Date Oct. 19, 2021,
PCT Pub. No. WO2020/218952, PCT Pub. Date Oct. 29, 2020.
Claims priority of application No. RU2019113052 (RU), filed on Apr. 26, 2019; application No. RU2019113053 (RU), filed on Apr. 26, 2019; and application No. RU2020103063 (RU), filed on Jan. 25, 2020.
Prior Publication US 2022/0310351 A1, Sep. 29, 2022
Int. Cl. H01J 35/10 (2006.01); H01J 35/18 (2006.01); H01J 35/08 (2006.01)
CPC H01J 35/10 (2013.01) [H01J 35/08 (2013.01); H01J 35/105 (2013.01); H01J 2235/082 (2013.01); H01J 2235/165 (2013.01)] 13 Claims
OG exemplary drawing
 
1. An X-ray source, comprising a vacuum chamber (1) with an X-ray window (2) for outputting an X-ray beam (3) generated in an interaction zone (4) of an electron beam (5) with a liquid-metal target (6) wherein
the liquid-metal target (6) is an annular layer of molten fusible metal located in an annular groove (7) implemented in a rotating anode assembly (8), a part of the rotating anode assembly is made in the form of a disk (12) having a peripheral portion in the form of an annular barrier (13), and the annular groove is implemented on the surface of the annular barrier facing the axis of rotation (10); due to the action of centrifugal force, the liquid-metal target (6) has a circular cylindrical surface with the axis of symmetry coinciding with the axis of rotation (10); while the annular groove (7) has a surface profile preventing an ejection of material of the liquid-metal target (6) in a radial direction and in both directions along the axis of rotation (10) of the rotating anode assembly (8);
further comprising a debris shield (27) that is rigidly mounted to surround the interaction zone (4), said shield comprising a first opening (22) for the entrance of the electron beam (5) and a second opening (28) for the exit of the X-ray beam (3), while the debris shield (27) is separated from the rotating anode assembly by slit gaps, wherein
a vector of the linear velocity of the target in the interaction zone and at least one of the two openings are located on opposite sides of the plane passing through the interaction zone (4) and the axis of rotation (10) and
the linear velocity of the target is high enough so that a droplet fraction of debris particles exiting the interaction zone (4) is directed mainly tangentially to the target surface and not towards the openings (22), (28) in the debris shield (27).