CPC H01G 4/40 (2013.01) [H01G 4/008 (2013.01); H01G 4/30 (2013.01)] | 20 Claims |
1. A stacked capacitor, comprising:
a capacitor stack including:
a base plate having a first surface and a second opposing surface,
a first dielectric layer on or over the base plate,
a first conductive plate on or over the first dielectric layer,
a second dielectric layer on or over the first conductive plate, and
a second conductive plate on or over the second dielectric layer, wherein:
the capacitor stack has a sloped side sloped with respect to the second surface of the base plate;
an insulating layer over the capacitor stack and the sloped side; and
a plurality of vias through the insulating layer to the capacitor stack, including a first via that connects to a portion of the first conductive plate exposed at the sloped side and a second via that connects to a portion of the second conductive plate exposed at the sloped side.
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