US 11,869,178 B2
System for predicting properties of structures, imager system, and related methods
Amitava Majumdar, Boise, ID (US); Qianlan Liu, Boise, ID (US); Pradeep Ramachandran, Lehi, UT (US); Shawn D. Lyonsmith, Boise, ID (US); Steve K. McCandless, Nampa, ID (US); Ted L. Taylor, Boise, ID (US); Ahmed N. Noemaun, Boise, ID (US); and Gordon A. Haller, Boise, ID (US)
Assigned to Micron Technology, Inc., Boise, ID (US)
Filed by Micron Technology, Inc., Boise, ID (US)
Filed on Dec. 10, 2020, as Appl. No. 17/117,222.
Application 17/117,222 is a division of application No. 16/100,729, filed on Aug. 10, 2018, granted, now 10,872,403.
Prior Publication US 2021/0090246 A1, Mar. 25, 2021
Int. Cl. G06T 7/00 (2017.01); G01N 21/47 (2006.01); G01N 21/21 (2006.01); G01B 1/00 (2006.01); G06N 20/00 (2019.01); G06F 30/367 (2020.01)
CPC G06T 7/0004 (2013.01) [G01B 1/00 (2013.01); G01N 21/211 (2013.01); G01N 21/4738 (2013.01); G06F 30/367 (2020.01); G06N 20/00 (2019.01); G01B 2210/56 (2013.01); G06T 2207/10024 (2013.01); G06T 2207/10152 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30148 (2013.01)] 18 Claims
OG exemplary drawing
 
1. An imager system, comprising:
a tunable light source oriented to emit light at a wafer and operably coupled to a power supply;
a diffuser disposed between the tunable light source and the wafer;
at least one diode disposed between the tunable light source and the wafer, the at least one diode configured to detect light emitted by the tunable light source; and
a controller configured to receive signals from the at least one diode and, responsive to the received signals, adjust current being supplied to the tunable light source via the power supply to balance color intensities of the light.