US 11,868,055 B2
Multifunctional lithography device
Xiangang Luo, Sichuan (CN); Xiaoliang Ma, Sichuan (CN); Mingbo Pu, Sichuan (CN); Ping Gao, Sichuan (CN); and Xiong Li, Sichuan (CN)
Assigned to The Institute of Optics and Electronics, The Chinese Academy of Sciences, Chengdu (CN)
Appl. No. 17/997,503
Filed by The Institute of Optics and Electronics, The Chinese Academy of Sciences, Sichuan (CN)
PCT Filed Apr. 28, 2021, PCT No. PCT/CN2021/090681
§ 371(c)(1), (2) Date Oct. 28, 2022,
PCT Pub. No. WO2021/219028, PCT Pub. Date Nov. 4, 2021.
Claims priority of application No. 202010354566.X (CN), filed on Apr. 29, 2020.
Prior Publication US 2023/0129163 A1, Apr. 27, 2023
Int. Cl. G03F 7/00 (2006.01); G03F 7/20 (2006.01)
CPC G03F 7/70775 (2013.01) [G03F 7/2004 (2013.01); G03F 7/70258 (2013.01); G03F 7/70716 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A multifunctional lithography device, comprising:
a vacuum substrate-carrying stage, wherein the vacuum substrate-carrying stage is configured to place a substrate, adsorb the substrate on the vacuum substrate-carrying stage by controlling an airflow, and provide a vacuum environment for the substrate and a mask plate, so as to control a gap between the substrate and the mask plate;
a mask frame arranged above the vacuum substrate-carrying stage and configured to fix the mask plate;
a substrate-carrying stage motion system arranged below the vacuum substrate-carrying stage and configured to adjust a position of the vacuum substrate-carrying stage, so that a distance between the substrate and the mask plate satisfies a preset condition;
an ultraviolet light source system arranged above the mask plate and configured to generate an ultraviolet light for lithography; and
a three-axis alignment optical path system configured to align the ultraviolet light with the mask plate;
wherein the substrate-carrying stage motion system comprises:
an XY-direction macro motion system configured to adjust displacements of the vacuum substrate-carrying stage in an X-axis direction and a Y-axis direction;
a Z-direction macro-micro three-point leveling system arranged on the XY-direction macro motion system, and configured to implement a coarse adjustment and a fine adjustment of a displacement of the vacuum substrate-carrying stage in a Z-axis direction,
wherein the XY-direction macro motion system comprises:
a motion base plate;
a first linear guide rail arranged on the motion base plate and having a direction of a Y-axis direction;
a Y-direction motion plate arranged on the first linear guide rail;
a second linear guide rail arranged on the Y-direction motion plate and having a direction of an X-axis direction perpendicular to the Y-axis direction;
an X-direction motion plate arranged on the second linear guide rail;
a first linear actuator arranged on the motion base plate, and configured to move the Y-direction motion plate along the first linear guide rail; and
a second linear actuator arranged on the Y-direction motion plate, and configured to move the X-direction motion plate along the second linear guide rail,
wherein the Z-direction macro-micro three-point leveling system is arranged on the X-direction motion plate and comprises:
a coarse displacement closed-loop system and an angular displacement mechanism, wherein the coarse displacement closed-loop system acts on the angular displacement mechanism, so that the vacuum substrate-carrying stage is displaced in the Z-axis direction, and the coarse displacement closed-loop system comprises:
a Z-direction coarse displacement rotary motor configured to adjust the displacement of the vacuum substrate-carrying stage in the Z-axis direction perpendicular to the X-axis direction and the Y-axis direction, wherein the coarse displacement closed-loop system feeds back and controls an operation of the Z-direction coarse displacement rotary motor according to a Z-direction displacement actually generated by the angular displacement mechanism;
a linear guide rail anti-deviation mechanism configured to ensure that the Z-direction coarse displacement rotary motor only outputs a Z-direction displacement; and
a three-point incremental grating ruler configured to read a Z-direction displacement actually generated by the Z-direction coarse displacement rotary motor.