CPC G03F 7/0043 (2013.01) [B05D 1/005 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01)] | 18 Claims |
1. A plurality of coated substrates each comprising a substrate and a dry coating comprising an organometallic patterning composition having an average thickness from about 6 nanometers (nm) to about 50 nm, wherein the plurality of coated substrates has an average three sigma variation in dry coating thickness of no more than about 1.2 nm with a one centimeter edge exclusion.
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