US 11,868,046 B2
Stable solutions of monoalkyl tin alkoxides and their hydrolysis and condensation products
Kai Jiang, Corvallis, OR (US); Stephen T. Meyers, Corvallis, OR (US); Lauren B. McQuade, Albany, OR (US); Jeremy T. Anderson, Corvallis, OR (US); Brian J. Cardineau, Corvallis, OR (US); Benjamin L Clark, Corvallis, OR (US); Dominick Smiddy, Corvallis, OR (US); and Margaret Wilson-Moses, Corvallis, OR (US)
Assigned to Inpria Corporation, Corvallis, OR (US)
Filed by Inpria Corporation, Corvallis, OR (US)
Filed on Mar. 8, 2022, as Appl. No. 17/689,135.
Application 17/689,135 is a continuation of application No. 16/446,732, filed on Jun. 20, 2019, granted, now 11,300,876.
Claims priority of provisional application 62/688,215, filed on Jun. 21, 2018.
Prior Publication US 2022/0187705 A1, Jun. 16, 2022
Int. Cl. G03F 7/004 (2006.01); G03F 7/20 (2006.01); G03F 7/16 (2006.01); B05D 1/00 (2006.01)
CPC G03F 7/0043 (2013.01) [B05D 1/005 (2013.01); G03F 7/168 (2013.01); G03F 7/20 (2013.01)] 18 Claims
 
1. A plurality of coated substrates each comprising a substrate and a dry coating comprising an organometallic patterning composition having an average thickness from about 6 nanometers (nm) to about 50 nm, wherein the plurality of coated substrates has an average three sigma variation in dry coating thickness of no more than about 1.2 nm with a one centimeter edge exclusion.