US 11,868,044 B2
Prepolymer composition intended to form a contrast layer and method for structuring an interface material
Xavier Chevalier, Grenoble (FR)
Assigned to Arkema France, Colombes (FR)
Appl. No. 17/785,324
Filed by ARKEMA FRANCE, Colombes (FR)
PCT Filed Dec. 29, 2020, PCT No. PCT/EP2020/088006
§ 371(c)(1), (2) Date Jun. 14, 2022,
PCT Pub. No. WO2021/136793, PCT Pub. Date Jul. 8, 2021.
Claims priority of application No. 1915800 (FR), filed on Dec. 31, 2019.
Prior Publication US 2023/0063847 A1, Mar. 2, 2023
Int. Cl. G03F 7/00 (2006.01); C08J 3/24 (2006.01); G03F 7/038 (2006.01); G03F 7/09 (2006.01); G03F 7/095 (2006.01)
CPC G03F 7/0002 (2013.01) [C08J 3/243 (2013.01); G03F 7/038 (2013.01); G03F 7/091 (2013.01); G03F 7/095 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method for structuring an interface material deposited on a block copolymer film, comprising the following steps:
depositing, on said block copolymer film, a prepolymer composition layer thereby creating a stack, said block copolymer comprising, on the one hand, a plurality of functional monomers and at least one crosslinkable functional group within its polymer chain and, on the other hand, two chemically different crosslinking agents, each agent being adapted to initiate crosslinking of said prepolymer in response to a stimulation specific thereto,
subjecting the stack thus created to a first stimulation localized on first areas, said first stimulation being selected from light radiation, ion bombardment, thermal stimulation, plasma, or an electrochemical process, so as to cause a crosslinking reaction of the molecular chains of said prepolymer by the action of a first one of crosslinking agents in said first areas subjected to said first stimulation, said first crosslinked areas obtained having a first affinity with respect to blocks of the underlying block copolymer,
subjecting the stack to a second stimulation selected from light radiation, ion bombardment, thermal stimulation, plasma, or an electrochemical process, so as to cause a crosslinking reaction of the molecular chains of said prepolymer by the action of a second one of said crosslinking agents in secondary areas not crosslinked after the first stimulation, said crosslinked secondary areas obtained, adjacent to the first areas, having a second affinity with respect to the blocks of the underlying block copolymer, the second affinity being opposite to the first affinity.
 
16. A crosslinkable prepolymer composition configured to form a contrast layer on a block copolymer film, said crosslinkable prepolymer composition comprising: a prepolymer comprising a plurality of functional monomers and at least one crosslinkable functional group within its polymer chain,
a first crosslinking agent adapted to initiate crosslinking of said prepolymer in response to a specific stimulation thereto to form a first crosslinked area having a first affinity with respect to blocks of the block copolymer film, and
a second crosslinking agent that is chemically different from the first crosslinking agent and that is adapted to initiate crosslinking of said prepolymer in response to a specific stimulation thereto to form a second crosslinked area having a second affinity with respect to the blocks of the block copolymer film,
wherein said second affinity is opposite to the first affinity.