CPC G03F 1/64 (2013.01) [G03F 1/62 (2013.01); G03F 7/2004 (2013.01)] | 20 Claims |
1. A pellicle frame comprising:
a check valve, wherein the check valve is configured to permit gas flow from an interior of a pellicle to an exterior of the pellicle; and
a bottom surface of the pellicle frame is flat having only a single recess therein, wherein a bottom surface of the pellicle frame is free of an adhesive; and
a gasket configured to fit within the single recess.
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