US 11,867,973 B2
High reliability varifocal electrostatic lens
Renate Eva Klementine Landig, Seattle, WA (US); Christopher Stipe, Woodinville, WA (US); Kenneth Diest, Kirkland, WA (US); Andrew John Ouderkirk, Kirkland, WA (US); Maik Andre Scheller, Redmond, WA (US); Sheng Ye, Redmond, WA (US); John Cooke, Bothell, WA (US); Yigit Menguc, Redmond, WA (US); Nagi Elabbasi, Menlo Park, CA (US); and James Ransley, Menlo Park, CA (US)
Assigned to Meta Platforms Technologies, LLC, Menlo Park, CA (US)
Filed by META PLATFORMS TECHNOLOGIES, LLC, Menlo Park, CA (US)
Filed on Sep. 8, 2020, as Appl. No. 17/014,336.
Claims priority of provisional application 62/901,748, filed on Sep. 17, 2019.
Prior Publication US 2021/0080688 A1, Mar. 18, 2021
Int. Cl. G02B 7/10 (2021.01); G03B 13/36 (2021.01); H04N 23/55 (2023.01)
CPC G02B 7/10 (2013.01) [G03B 13/36 (2013.01); H04N 23/55 (2023.01)] 13 Claims
OG exemplary drawing
 
1. A varifocal lens comprising:
a substrate having an inclined region;
a primary electrode disposed over the inclined region of the substrate;
a dielectric layer disposed over the primary electrode;
a deformable membrane disposed over and at least partially spaced away from the dielectric layer;
a secondary electrode disposed over a surface of the deformable membrane facing toward or away from the dielectric layer and overlying at least a portion of the primary electrode;
a hydrophilic layer disposed over the secondary electrode, the hydrophilic layer facing the dielectric layer; and
a primary fluid between the deformable membrane and the substrate, wherein:
the primary electrode and the secondary electrode have variable geometries that enable the primary electrode and secondary electrode to control, in response to an applied voltage, a shape of the deformable membrane.