CPC G02B 5/3025 (2013.01) [G01J 4/04 (2013.01)] | 21 Claims |
1. A detector comprising:
a substrate;
an array of subwavelength-spaced phase-shifting elements disposed on the substrate and configured to produce, when illuminated with a polarized incident light, a diffracted light beam with a distinct polarization state for each of a finite number of diffraction orders, wherein the finite number is 2 or more; and
one or more detecting elements, each configured to detect the diffracted light beam for one of the diffraction orders.
|