US 11,867,935 B2
Optical interference filter
Jinhui Yang, Santa Rosa, CA (US); Marius Grigonis, Santa Rosa, CA (US); Georg J. Ockenfuss, Santa Rosa, CA (US); and Karen Denise Hendrix, Santa Rosa, CA (US)
Assigned to VIAVI Solutions Inc., Chandler, AZ (US)
Filed by VIAVI Solutions Inc., San Jose, CA (US)
Filed on Sep. 28, 2021, as Appl. No. 17/449,149.
Prior Publication US 2023/0097506 A1, Mar. 30, 2023
Int. Cl. G02B 5/28 (2006.01); B32B 7/023 (2019.01); B32B 7/02 (2019.01); B32B 17/10 (2006.01); C23C 14/00 (2006.01); C23C 14/06 (2006.01); C23C 14/34 (2006.01); C23C 14/35 (2006.01); G02B 5/20 (2006.01)
CPC G02B 5/285 (2013.01) [B32B 7/02 (2013.01); B32B 7/023 (2019.01); B32B 17/10229 (2013.01); C23C 14/0036 (2013.01); C23C 14/0617 (2013.01); C23C 14/3464 (2013.01); C23C 14/35 (2013.01); G02B 5/207 (2013.01); Y10T 428/24942 (2015.01); Y10T 428/266 (2015.01)] 20 Claims
OG exemplary drawing
 
1. An optical interference filter, comprising:
a substrate; and
a set of layers that are disposed on the substrate, wherein the set of layers includes:
a first subset of layers,
wherein the first subset of layers comprises a tensile aluminum nitride (AlN) material; and
a second subset of layers,
wherein the second subset of layers comprises a compressive hydrogenated silicon (Si:H) material.