CPC G02B 5/285 (2013.01) [B32B 7/02 (2013.01); B32B 7/023 (2019.01); B32B 17/10229 (2013.01); C23C 14/0036 (2013.01); C23C 14/0617 (2013.01); C23C 14/3464 (2013.01); C23C 14/35 (2013.01); G02B 5/207 (2013.01); Y10T 428/24942 (2015.01); Y10T 428/266 (2015.01)] | 20 Claims |
1. An optical interference filter, comprising:
a substrate; and
a set of layers that are disposed on the substrate, wherein the set of layers includes:
a first subset of layers,
wherein the first subset of layers comprises a tensile aluminum nitride (AlN) material; and
a second subset of layers,
wherein the second subset of layers comprises a compressive hydrogenated silicon (Si:H) material.
|