CPC G01S 7/4912 (2013.01) [G01S 7/4816 (2013.01); G01S 17/931 (2020.01); H01L 27/1443 (2013.01); H01L 27/1446 (2013.01)] | 20 Claims |
1. A system including a single photon counting sensor array comprising:
a detector array comprising a plurality of pixels, wherein each pixel comprises one or more detectors, a plurality of which are configured to receive pulses of energy; and
a mask material that is positioned to cover some but not all of the detectors of the plurality of pixels to yield blocked pixels and unblocked pixels so that each blocked pixel is prevented from detecting the pulses of energy,
wherein:
each detector comprises a photosensor that comprise a surface region of p-type semiconductor material that is positioned to receive light, and
each blocked pixel has the mask material positioned over its surface region to block light from entering the blocked pixel through the surface region.
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