US 11,867,843 B2
Real time noise detection method and system for photon counting pixel array comprising a mask material to yield blocked pixels from detecting reflected pulses of energy
John Hostetler, Hightstown, NJ (US); and Yahla Tachwali, Princeton, NJ (US)
Assigned to LG INNOTEK CO., LTD., Seoul (KR)
Filed by LG INNOTEK CO., LTD., Seoul (KR)
Filed on Sep. 6, 2022, as Appl. No. 17/929,767.
Application 17/929,767 is a continuation of application No. 17/062,856, filed on Oct. 5, 2020, granted, now 11,486,987.
Prior Publication US 2023/0003859 A1, Jan. 5, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G01S 7/491 (2020.01); G01S 7/4912 (2020.01); G01S 7/481 (2006.01); G01S 17/931 (2020.01); H01L 27/144 (2006.01)
CPC G01S 7/4912 (2013.01) [G01S 7/4816 (2013.01); G01S 17/931 (2020.01); H01L 27/1443 (2013.01); H01L 27/1446 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A system including a single photon counting sensor array comprising:
a detector array comprising a plurality of pixels, wherein each pixel comprises one or more detectors, a plurality of which are configured to receive pulses of energy; and
a mask material that is positioned to cover some but not all of the detectors of the plurality of pixels to yield blocked pixels and unblocked pixels so that each blocked pixel is prevented from detecting the pulses of energy,
wherein:
each detector comprises a photosensor that comprise a surface region of p-type semiconductor material that is positioned to receive light, and
each blocked pixel has the mask material positioned over its surface region to block light from entering the blocked pixel through the surface region.