US 11,867,779 B2
Sensor
Hiromichi Umehara, Tokyo (JP); Keita Kawamori, Tokyo (JP); Kenzo Makino, Tokyo (JP); and Masachika Hashino, Tokyo (JP)
Assigned to TDK CORPORATION, Tokyo (JP)
Filed by TDK CORPORATION, Tokyo (JP)
Filed on Sep. 15, 2022, as Appl. No. 17/945,397.
Claims priority of provisional application 63/246,437, filed on Sep. 21, 2021.
Claims priority of application No. 2022-134769 (JP), filed on Aug. 26, 2022.
Prior Publication US 2023/0086267 A1, Mar. 23, 2023
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01)
CPC G01R 33/093 (2013.01) [G01R 33/0047 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A sensor configured to detect a predetermined physical quantity, comprising:
a substrate including a top surface;
a support member disposed on the substrate; and
a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein
the support member includes a first layer and a second layer disposed on the first layer, and also includes at least one inclined surface formed across the first layer and the second layer,
the sensor element includes a functional layer constituting at least a part of the sensor element, and
the functional layer is disposed on the at least one inclined surface.