CPC G01R 33/093 (2013.01) [G01R 33/0047 (2013.01)] | 18 Claims |
1. A sensor configured to detect a predetermined physical quantity, comprising:
a substrate including a top surface;
a support member disposed on the substrate; and
a sensor element configured to change in a physical property depending on the predetermined physical quantity, wherein
the support member includes a first layer and a second layer disposed on the first layer, and also includes at least one inclined surface formed across the first layer and the second layer,
the sensor element includes a functional layer constituting at least a part of the sensor element, and
the functional layer is disposed on the at least one inclined surface.
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