CPC G01R 31/2886 (2013.01) | 16 Claims |
1. A contact assembly for a Kelvin testing system for testing integrated circuit devices, comprising:
at least one grouping of blades including a first force blade, a second force blade, a first sense blade, and a second sense blade; the first force blade, the second force blade, the first sense blade, and the second sense blade being disposed in a side by side generally parallel relationship; the first force blade, the second force blade, the first sense blade, and the second sense blade being configured to be longitudinally slidable with respect to each other; the first force blade and the second force blade being staggered in a longitudinal direction; the first sense blade and the second sense blade being staggered in the longitudinal direction;
an electrical insulation layer disposed between the first force blade and the first sense blade and between the second force blade and the second sense blade; and
an elongated elastomer, the elastomer being configured to be retained by the first force blade, the second force blade, the first sense blade, and the second sense blade;
wherein each of the first force blade, the second force blade, the first sense blade, and the second sense blade includes a recess having an opening and sized to receive and retain at least a portion of the elastomer;
wherein the first force blade, the second force blade, the first sense blade, and the second sense blade are electrically conductive; the insulation layer and the elastomer are non-conductive, and
wherein the openings of the first force blade and the first sense blade face a direction opposite to the openings of the second force blade and the second sense blade, such that the elastomer is enclosed and surrounded by a body of each of the first force blade, the second force blade, the first sense blade, and the second sense blade in a plan view.
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