US 11,867,747 B2
Transfer apparatus for inspection apparatus, inspection apparatus, and object inspection method using same
Myong Kang, Gunpo-si Gyeonggi-do (KR); Kang Jo Hwang, Seoul (KR); and Choung Min Jung, Siheung-si Gyeonggi-do (KR)
Assigned to KOH YOUNG TECHNOLOGY INC., Seoul (KR)
Appl. No. 17/425,511
Filed by KOH YOUNG TECHNOLOGY INC., Seoul (KR)
PCT Filed Jan. 22, 2020, PCT No. PCT/KR2020/001074
§ 371(c)(1), (2) Date Jul. 23, 2021,
PCT Pub. No. WO2020/153742, PCT Pub. Date Jul. 30, 2020.
Claims priority of application No. 10-2019-0009391 (KR), filed on Jan. 24, 2019.
Prior Publication US 2022/0091180 A1, Mar. 24, 2022
Int. Cl. G01R 31/02 (2006.01); G01R 31/304 (2006.01); G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/28 (2006.01)
CPC G01R 31/2808 (2013.01) 18 Claims
OG exemplary drawing
 
1. A transfer apparatus for an inspection apparatus, comprising:
an upper end engaging portion configured to make contact with an upper surface of a transferred article including an inspection object;
a support frame to which the upper end engaging portion is fixed;
a lift including a support part configured to support a lower surface of the transferred article, the lift arranged on the support frame to be movable in an up-down direction; and
a lifting driver configured to provide a driving force to move the lift in the up-down direction,
wherein the lift includes a side guide configured to make contact with a left surface or a right surface of the transferred article,
the upper end engaging portion includes a plurality of lower surfaces arranged to form a plurality of gaps in a front-rear direction and configured to make contact with the upper surface of the transferred article, and
the side guide includes a plurality of side guide protrusions protruding upward to be inserted into the plurality of gaps and configured to make contact with the left surface or the right surface of the transferred article.