CPC G01N 23/223 (2013.01) | 8 Claims |
1. A total reflection X-ray fluorescence spectrometer, comprising:
an X-ray source that has an electron beam focal point having an effective width in a direction parallel to a surface of a sample, and orthogonal to an X-ray irradiation direction, that is larger than a dimension in the X-ray irradiation direction;
a reflective optic that has an effective width in the direction parallel to the surface of the sample, and orthogonal to the X-ray irradiation direction, that is larger than the effective width of the electron beam focal point, and has a curved cross section in a plane containing the X-ray irradiation direction and being perpendicular to the surface of the sample; and
a plurality of detectors that are directed toward the surface of the sample, are arranged in a row in the direction orthogonal to the X-ray irradiation direction, and are configured to measure intensities of fluorescent X-rays generated from the sample irradiated with X-rays focused by the reflective optic.
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