CPC G01N 21/255 (2013.01) [G01N 21/1717 (2013.01); G01R 31/2635 (2013.01); G01R 31/2656 (2013.01); G02B 21/06 (2013.01); G02B 21/26 (2013.01); G02B 21/361 (2013.01); G01N 2021/1721 (2013.01)] | 15 Claims |
1. An optical inspection apparatus comprising:
a stage that supports a target substrate, the target substrate including a plurality of light emitting elements;
a jig that applies an electrical signal to the target substrate, the jig including;
a connector creating an electrical connection with a pad on the target substrate, and
a regulation resistor that is electrically connected in series between the connector and a power supply;
a microscope that generates magnified image data of the target substrate;
a camera that captures the magnified image data to generate a color image of the target substrate; and
an optical measurement unit that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate.
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