US 11,867,612 B2
Optical inspection apparatus
Je Won Yoo, Bucheon-si (KR); Basrur Veidhes, Yongin-si (KR); Dae Hyun Kim, Hwaseong-si (KR); Hyun Min Cho, Seoul (KR); Jong Won Lee, Hwaseong-si (KR); and Joo Yeol Lee, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Mar. 18, 2021, as Appl. No. 17/205,487.
Claims priority of application No. 10-2020-0075648 (KR), filed on Jun. 22, 2020.
Prior Publication US 2021/0396654 A1, Dec. 23, 2021
Int. Cl. G01N 21/25 (2006.01); G02B 21/06 (2006.01); G02B 21/36 (2006.01); G01N 21/17 (2006.01); G02B 21/26 (2006.01); G01R 31/26 (2020.01); G01R 31/265 (2006.01)
CPC G01N 21/255 (2013.01) [G01N 21/1717 (2013.01); G01R 31/2635 (2013.01); G01R 31/2656 (2013.01); G02B 21/06 (2013.01); G02B 21/26 (2013.01); G02B 21/361 (2013.01); G01N 2021/1721 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An optical inspection apparatus comprising:
a stage that supports a target substrate, the target substrate including a plurality of light emitting elements;
a jig that applies an electrical signal to the target substrate, the jig including;
a connector creating an electrical connection with a pad on the target substrate, and
a regulation resistor that is electrically connected in series between the connector and a power supply;
a microscope that generates magnified image data of the target substrate;
a camera that captures the magnified image data to generate a color image of the target substrate; and
an optical measurement unit that captures the magnified image data of the target substrate to generate a spectrum image and measure optical characteristics of the target substrate.