CPC G01L 1/2268 (2013.01) [G01L 1/146 (2013.01)] | 13 Claims |
1. A pressure/force sensor comprising:
a diaphragm structure including a sensing element;
a lead structure extending from the diaphragm structure, the lead structure including first and second traces electrically coupled to the sensing element, wherein the first trace is electrically connected to a first electrode, and wherein the second trace is electrically connected to a second electrode; and
wherein the diaphragm structure and the lead structure include a circuit assembly comprising:
a common insulating layer;
a via connecting the second electrode to the second trace through the common insulating layer; and
a common conductor layer on the insulating layer, including at least a portion of the sensing element and at least the first trace.
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