US 11,867,556 B2
Spectrometer including metasurface
Seunghoon Han, Seoul (KR); Amir Arbabi, Pasadena, CA (US); Andrei Faraon, Pasadena, CA (US); and Ehsan Arbabi, Pasadena, CA (US)
Assigned to SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (US)
Filed by SAMSUNG ELECTRONICS CO., LTD., Suwon-si (KR); and CALIFORNIA INSTITUTE OF TECHNOLOGY, Pasadena, CA (US)
Filed on Sep. 27, 2021, as Appl. No. 17/486,326.
Application 17/486,326 is a continuation of application No. 16/692,776, filed on Nov. 22, 2019, granted, now 11,162,841.
Application 16/692,776 is a continuation of application No. 15/221,184, filed on Jul. 27, 2016, granted, now 10,514,296, issued on Dec. 24, 2019.
Claims priority of provisional application 62/198,337, filed on Jul. 29, 2015.
Claims priority of application No. 10-2016-0045802 (KR), filed on Apr. 14, 2016.
Prior Publication US 2022/0011161 A1, Jan. 13, 2022
Int. Cl. G01J 3/02 (2006.01); G01J 3/28 (2006.01); G01J 3/447 (2006.01); B82Y 20/00 (2011.01)
CPC G01J 3/0208 (2013.01) [G01J 3/0205 (2013.01); G01J 3/0224 (2013.01); G01J 3/0256 (2013.01); G01J 3/0259 (2013.01); G01J 3/2803 (2013.01); G01J 3/447 (2013.01); B82Y 20/00 (2013.01)] 13 Claims
OG exemplary drawing
 
1. A spectrometer comprising:
a transparent substrate comprising a first surface and a second surface that face each other and are substantially parallel to each other;
a slit provided on the first surface and through which light is incident onto the transparent substrate;
a spectrum optical system comprising at least one metasurface comprising a plurality of nanostructures that are two-dimensionally arranged and satisfy a sub-wavelength scattering condition, wherein the at least one metasurface comprises:
a focusing metasurface which includes first nanostructures of the plurality of nanostructures, and is configured to reflect, disperse, and focus the light incident thereon through the slit, at different angles based on respective wavelengths, the focusing metasurface provided on the first surface or the second surface;
a collimating metasurface provided on the same surface as the focusing metasurface; and
a grating metasurface provided on a surface opposite to the focusing metasurface; and
an aberration control metasurface provided on the surface opposite to the focusing metasurface; and
a sensor configured to receive the light from the focusing metasurface,
wherein an optical path from the slit to the sensor comprises a path from the slit, to the collimating metasurface, to the grating metasurface, to the focusing metasurface, to the aberration control metasurface, and to the sensor, and
wherein, when L is a total length of the optical path and D is a thickness of the transparent substrate, L and D satisfy the following inequality:
L/D>3.