US 11,867,497 B2
Method for measuring film thickness of semiconductor device
Yongshang Sheng, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Jan. 18, 2022, as Appl. No. 17/648,216.
Application 17/648,216 is a continuation of application No. PCT/CN2021/112915, filed on Aug. 17, 2021.
Claims priority of application No. 202110332821.5 (CN), filed on Mar. 29, 2021.
Prior Publication US 2022/0307818 A1, Sep. 29, 2022
Int. Cl. G01B 11/06 (2006.01); G01N 21/21 (2006.01); H01L 21/66 (2006.01)
CPC G01B 11/0625 (2013.01) [G01N 21/211 (2013.01); G01N 2021/213 (2013.01); H01L 22/12 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A method for measuring a film thickness of a semiconductor device, the semiconductor device comprising a substrate and a target film disposed on the substrate, the semiconductor device having a main storage region, the method comprising:
providing a reference spectrogram of a main storage region of a reference semiconductor device;
obtaining a first measured spectrogram of a main storage region of a semiconductor device to be measured;
adjusting a thickness parameter of a target film in the main storage region of the reference semiconductor device within a preset range based on the reference spectrogram, obtaining an adjusted reference spectrogram, and comparing the first measured spectrogram with the adjusted reference spectrogram;
when a similarity between the first measured spectrogram and the adjusted reference spectrogram is greater than a first preset value, using a thickness parameter corresponding to the adjusted reference spectrogram as a thickness of a target film in the main storage region of the semiconductor device to be measured; and
when the similarity between the first measured spectrogram and the adjusted reference spectrogram is less than the first preset value, continuing to adjust the thickness parameter of the target film in the main storage region of the reference semiconductor device within the preset range, until the similarity between the first measured spectrogram and the adjusted reference spectrogram is greater than the first preset value;
wherein, the first preset value is greater than zero and less than or equal to 1.