US 11,867,496 B2
Measurement system, measurement support method, and computer-readable medium
Yosuke Tani, Tokyo (JP); Hirofumi Hori, Tokyo (JP); Takahiro Furukawa, Tokyo (JP); Tsukasa Nittono, Tokyo (JP); and Takayuki Komiya, Tokyo (JP)
Assigned to Evident Corporation, Nagano (JP)
Filed by Evident Corporation, Nagano (JP)
Filed on Oct. 4, 2021, as Appl. No. 17/493,745.
Claims priority of application No. 2020-169375 (JP), filed on Oct. 6, 2020.
Prior Publication US 2022/0107169 A1, Apr. 7, 2022
Int. Cl. G01B 11/06 (2006.01); G06T 7/40 (2017.01); G01B 11/30 (2006.01)
CPC G01B 11/0608 (2013.01) [G01B 11/303 (2013.01); G06T 7/40 (2013.01); G06T 2207/10056 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A measurement system, comprising:
an optical measurement instrument that measures a surface of a specimen, the measurement instrument comprising an objective lens; and
a control apparatus that controls the measurement instrument,
wherein the control apparatus includes:
at least one non-transitory computer-readable media that includes an instruction; and
at least one processor that executes the instruction,
wherein the instruction is executable to cause the at least one processor to execute an operation,
wherein the operation includes:
causing the measurement instrument to repetitively measure the surface of the specimen without changing a setting; and
evaluating an appropriateness of the setting for measuring a surface texture of the specimen, based on a comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument,
wherein the setting includes a setting of the objective lens, and
wherein the evaluating the appropriateness of the setting includes evaluating an appropriateness of the objective lens for the surface texture of the specimen, based on the measurement value of the surface texture of the specimen, the degree of variation in measurement by the measurement instrument, and a measurement mode indicating a priority degree of measurement precision over a measurement speed.
 
13. A measurement system, comprising:
an optical measurement instrument that measures a surface of a specimen; and
a control apparatus that controls the measurement instrument,
wherein the control apparatus includes:
at least one non-transitory computer-readable media that includes an instruction; and
at least one processor that executes the instruction,
wherein the instruction is executable to cause the at least one processor to execute an operation, and
wherein the operation includes:
causing the measurement instrument to repetitively measure the surface of the specimen without changing a setting;
evaluating an appropriateness of the setting for measuring a surface texture of the specimen, based on a comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument;
changing the setting depending on an evaluation result of the appropriateness of the setting;
causing the measurement instrument to repetitively measure the surface of the specimen with the changed setting;
evaluating an appropriateness of the changed setting for measuring the surface texture of the specimen, based on a comparison between a measurement value of the surface texture of the specimen calculated from a measurement data item output from the measurement instrument after the setting is changed, and a degree of variation in measurement by the measurement instrument calculated from a plurality of measurement data items output from the measurement instrument after the setting is changed; and
fixing the setting when the evaluation result satisfies a predetermined reference.