CPC C08G 77/26 (2013.01) [C08G 77/18 (2013.01); C08G 77/52 (2013.01); C08L 83/14 (2013.01); C09D 183/14 (2013.01); G03F 7/0757 (2013.01); H01L 27/1248 (2013.01)] | 18 Claims |
1. A method for producing a cured film manufactured by applying a composition on a substrate and heating is performed at 450° C. or more and wherein the composition comprises
a polysiloxane (Pa) comprising:
a repeating unit represented by the following formula (Ia):
wherein
R1 is hydrogen, a monovalent, linear, branched or cyclic, saturated or unsaturated C1-30 aliphatic hydrocarbon group, or a monovalent, C6-30 aromatic hydrocarbon group,
in said aliphatic hydrocarbon group and said aromatic hydrocarbon group, one or more methylene are unsubstituted or substituted with oxy, imide or carbonyl, one or more hydrogens are unsubstituted or substituted with fluorine, hydroxy or alkoxy, and one or more carbons are unsubstituted or substituted with silicon; and
a repeating unit represented by the following formula (Ib):
wherein
R2 is each independently hydrogen, C1-10 alkyl, C6-20 aryl or C2-10 alkenyl, which is unsubstituted or substituted with oxygen or nitrogen,
L is each independently phenylene, naphthylene or biphenylene, which is unsubstituted or substituted with oxygen or nitrogen,
m is each independently an integer of 2,
n is each independently an integer of 1,
q is 1 and
a solvent.
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