US 11,866,553 B2
Polysiloxane, composition comprising the same and cured film using the same
Naofumi Yoshida, Yokohama (JP); Megumi Takahashi, Kakegawa (JP); Seishi Shibayama, Kakegawa (JP); Katsuto Taniguchi, Kakegawa (JP); Masanobu Hayashi, Kakegawa (JP); and Toshiaki Nonaka, Tokyo (JP)
Assigned to Merck Patent GmbH, Darmstadt (DE)
Appl. No. 16/768,658
Filed by Merck Patent GmbH, Darmstadt (DE)
PCT Filed Nov. 29, 2018, PCT No. PCT/EP2018/082943
§ 371(c)(1), (2) Date May 30, 2020,
PCT Pub. No. WO2019/106064, PCT Pub. Date Jun. 6, 2019.
Claims priority of application No. 2017-231770 (JP), filed on Dec. 1, 2017.
Prior Publication US 2021/0171718 A1, Jun. 10, 2021
Int. Cl. C08G 77/52 (2006.01); C08G 77/26 (2006.01); C08G 77/18 (2006.01); C08L 83/14 (2006.01); C09D 183/14 (2006.01); G03F 7/075 (2006.01); H01L 27/12 (2006.01)
CPC C08G 77/26 (2013.01) [C08G 77/18 (2013.01); C08G 77/52 (2013.01); C08L 83/14 (2013.01); C09D 183/14 (2013.01); G03F 7/0757 (2013.01); H01L 27/1248 (2013.01)] 18 Claims
 
1. A method for producing a cured film manufactured by applying a composition on a substrate and heating is performed at 450° C. or more and wherein the composition comprises
a polysiloxane (Pa) comprising:
a repeating unit represented by the following formula (Ia):

OG Complex Work Unit Chemistry
wherein
R1 is hydrogen, a monovalent, linear, branched or cyclic, saturated or unsaturated C1-30 aliphatic hydrocarbon group, or a monovalent, C6-30 aromatic hydrocarbon group,
in said aliphatic hydrocarbon group and said aromatic hydrocarbon group, one or more methylene are unsubstituted or substituted with oxy, imide or carbonyl, one or more hydrogens are unsubstituted or substituted with fluorine, hydroxy or alkoxy, and one or more carbons are unsubstituted or substituted with silicon; and
a repeating unit represented by the following formula (Ib):

OG Complex Work Unit Chemistry
wherein
R2 is each independently hydrogen, C1-10 alkyl, C6-20 aryl or C2-10 alkenyl, which is unsubstituted or substituted with oxygen or nitrogen,
L is each independently phenylene, naphthylene or biphenylene, which is unsubstituted or substituted with oxygen or nitrogen,
m is each independently an integer of 2,
n is each independently an integer of 1,
q is 1 and
a solvent.